1.1 vacuumcoating: a method of preparing a film layer on a substrate under vacuum.
1.2 substrate: film layer receiver.
1.3 testingsubstrate: the substrate used for measurement and/or test at the beginning, during or after coating.
1.4 coatingmaterial: the raw material used to make the coating.
1.5 evaporationmaterial: coating material used for evaporation in vacuum evaporation.
1.6 sputteringmaterial: there are coating materials used for sputtering in vacuum sputtering.
1.7 filmmaterial (film material) film material: the material of the film layer.
1.8 evaporationrate: the amount of material evaporated in a given time interval, divided by the time interval.
1.9 sputteringrate: the amount of material sputtered in a given time interval, divided by the time interval.
1.10 depositionrate: the amount of material deposited on the substrate in a given time interval, divided by the time interval and the surface area of the substrate.
1.11 coatingangle: the angle between the direction of particles incident on the substrate and the normal of the surface to be coated.
2 process
2.1 vacuumevaporationcoating: the vacuum coating process that evaporates the coating material.
2.1.1 simultaneousevaporation: vacuum evaporation in which several evaporators are used to evaporate various evaporation materials on the substrate at the same time.
2.1.2 evaporationfieldevaporation: the vacuum evaporation from the materials evaporated at the same time in the evaporation field to the substrate (this process is applied to large-area evaporation to obtain ideal film thickness distribution).
2.1.3 reactivevacuumevaporation: the vacuum evaporation of the film material with ideal chemical composition by reacting with gas.
2.1.4 Reactive vacuum evaporation in evaporator: vacuum evaporation of film materials with ideal chemical composition by reacting with various evaporation materials in evaporator.
2.1.5 directheatingevaporation: The heat necessary for evaporation of evaporation material is the evaporation of the evaporation material (in or without crucible) itself.
2.1.6 inducedheatingevaporation: evaporation of evaporation materials by induction eddy current heating.
2.1.7 electronbeamevaporation: evaporation of evaporating materials heated by electron bombardment.